3D nanolithography with metalens arrays and spatially adaptive...

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3D nanolithography with metalens arrays and spatially adaptive illumination

Nature, Published online: 17 December 2025; doi:10.1038/s41586-025-09842-xA three-dimensional (3D) nanofabrication platform based on metalens-generated focal spot arrays is introduced to parallelize two-photon lithography beyond centimetre-scale write field areas, revealing the potential of 3D nanolithography towards wafer-scale production.

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